LED

LED

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Process Flow

Sapphire Wafer Cleaning

LED

Dry Etching

RIE-200iPC

Patterned Sapphire Substrate (PSS)

LED

MOCVD

p-GaN/Active/n-GaN Layer Deposition

LED

Photolithography

LED

Dry Etching

RIE-200iPC

Expose n-GaN Layer by Etching

LED

Dry Cleaning

SuperLiner

Electrode
Formation

LED

Dry Etching

RIE-200iPC

Element Separation by Etching

LED

Plasma CVD

PD-220NL

Passivation Layer Deposition

LED

Photolithography

LED

Dry Etching

RIE-200C

Contact Hole
Etching

LED

Dicing

Dry Cleaning

FlexLiner

Wire Bonding

LED

Dry Cleaning

FlexLiner

Phosphor Coating Cleaning before Packaging

LED

LED

LED

Contact Us

samco-ucp ltd.
Industriering 10 LI-9491 Ruggell Liechtenstein
Phone: 423-377-5959
Email: info@samco-ucp.com

TECH NOTES

Upcoming Exhibitions

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