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Sapphire Wafer Cleaning
Dry Etching
RIE-200iPC
Patterned Sapphire Substrate (PSS)
MOCVD
p-GaN/Active/n-GaN Layer Deposition
Photolithography
Expose n-GaN Layer by Etching
Dry Cleaning
SuperLiner
ElectrodeFormation
Element Separation by Etching
Plasma CVD
PD-220NL
Passivation Layer Deposition
RIE-200C
Contact Hole Etching
Dicing
FlexLiner
Wire Bonding
Phosphor Coating Cleaning before Packaging
LED
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