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Epitaxial Growth
Plasma CVD
PD-220NL
Mask Deposition
Photolithography
Dry Etching
RIE-200iP
SiO2 Etching
Ion implant & Annealing
Mask Removal
SiO2 Mask Deposition
RIE-800iP
SiO2 Mask Etching
SiC Etching
SiO2 Mask Removal
SiO2 Film Deposition
RIE-101iPH
Plasma Cleaning
SuperLiner
ElectrodeFormation
FlexLiner
Power Transistor
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