Etching Systems

RIE Systems

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Since our establishment in 1979 we has developed a wealth of dry etching expertise. Today our product line includes, open-load, load-lock, and cassette type systems for both R&D and Mass Production customers.

RIE-10NR

RIE-10NR

  • Process up to ø8" wafers
  • Multi-step recipe storage
  • UL Certified

Details

RIE-200NL

RIE-200NL

  • Load-lock dry etching system
  • Processes up to ø8" wafers
  • Small footprint
  • Multi-step recipe storage

Details

RIE-300NR

RIE-300NR

  • Fully automated control
  • Process up to ø12" wafers
  • Multi-step recipe storage
  • SEMI-S2 Certified

Details

RIE-100C

RIE-100C

  • Process up to ø4" wafers
  • Cassette-to-cassette type
  • Fully automated control
  • Multi-step recipe storage
  • Production type RIE system

Details

RIE-200C

RIE-200C

  • Process up to ø8" wafers
  • Cassette-to-cassette type
  • Stainless steel chamber
  • Features a dual-arm robot

Details

Contact Us

samco-ucp ltd.
Industriering 10 LI-9491 Ruggell Liechtenstein
Phone: 423-377-5959
Email: info@samco-ucp.com

TECH NOTES

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