Since our establishment in 1979 we has developed a wealth of dry etching
expertise. Today our product line includes, open-load, load-lock, and cassette type systems
for both R&D and Mass Production customers.
- Process up to ø8" wafers
- Multi-step recipe storage
- UL Certified
- Load-lock dry etching system
- Processes up to ø8" wafers
- Small footprint
- Multi-step recipe storage
- Fully automated control
- Process up to ø12" wafers
- Multi-step recipe storage
- SEMI-S2 Certified
- Process up to ø4" wafers
- Cassette-to-cassette type
- Fully automated control
- Multi-step recipe storage
- Production type RIE system
- Process up to ø8" wafers
- Cassette-to-cassette type
- Stainless steel chamber
- Features a dual-arm robot