Cleaning Systems


Plasma Cleaning System
The samco-ucp PC-1100 is a parallel-plate plasma cleaning system designed for surface cleaning of products such as plastic microelectronic packages, liquid crystal display (LCD) substrates and hybrid ICs.
The process chamber enables the user to install multiple sample shelves, and the high degree of flexibility in terms of configuration supports the batch processing of a wide degree of products, from small electronic components to large FPD substrates.
The PC-1100 provides 3 different processing modes (RIE mode, Plasma mode and downstreatm mode) which enables the user to select the optimum processing environment for the unique needs of each product type.


Main Unit: 868(W) x 939(D) x 602(H) mm
Stand: 860(W) x 850(D) x 703(H) mm



  • - Additional gas lines
  • - Additional processing shelves
  • - Larger RF generator (1kW)

Contact Us

  • Features
  • Applications
  • System provides three different process modes: RIE, Plasma and downstream modes

  • Process chamber can be configured with multiple large processing shelves

  • Fully automated processing (touch panel)

  • Recipes can be created and stored using the operator interface

  • The system has a small footprint and can be installed on a tabletop

  • Surface cleaning of plastic packages, LCD substrates, multi-chip modules and hybrid ICs

  • Precision cleaning of optical components

  • Surface processing of textiles and polymer materials

  • Ashing of photoresist

  • Ink removal

Contact Us

samco-ucp ltd.
Industriering 10 LI-9491 Ruggell Liechtenstein
Phone: 423-377-5959


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