> Cleaning Systems > Plasma Cleaners (Direct Plasma) > PC-1100
Dimensions:
Main Unit: 868(W) x 939(D) x 602(H) mm
Options:
System provides three different process modes: RIE, Plasma and downstream modes
Process chamber can be configured with multiple large processing shelves
Fully automated processing (touch panel)
Recipes can be created and stored using the operator interface
The system has a small footprint and can be installed on a tabletop
Surface cleaning of plastic packages, LCD substrates, multi-chip modules and hybrid ICs
Precision cleaning of optical components
Surface processing of textiles and polymer materials
Ashing of photoresist
Ink removal