samco-ucp's line of UV-Ozone Cleaners utilize a combination of ultraviolet light, high concentration ozone and a heated stage to provide a completely dry and damage free cleaning process.

UV-2

• Compact bench-top system
• Drawer loaded
• Process up to 8" wafers
• Heated sample stage

UV-300HC

• Cassette-to-cassette operation
• Temperature control (Ambient to 300°C)
• High-concentration ozone generators
• Two cassettes with 12 trays/cassette