Cleaning Systems

Plasma Cleaners (Remote Plasama)

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samco-ucp's solutions include compact systems for R&D and production systems.

FlexLinerII

FlexLiner II

  • Process up to 330×330mm
  • Gentle substrate handling
  • Single substrate
  • Hollow cathode

Details

SuperLiner

SuperLiner Wafer

  • Process up to ø12" wafers
  • Cassette system
  • Hollow cathode

Details

LFC063

LFC063

  • Process up to 280×330mm
  • High throughput
  • Single substrate
  • Hollow cathode

Details

LFC150

LFC150

  • Process up to ø8" wafers
  • Magazine processing
  • Hot cathode

Details

Contact Us

samco-ucp ltd.
Industriering 10 LI-9491 Ruggell Liechtenstein
Phone: 423-377-5959
Email: info@samco-ucp.com

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