> Cleaners
> Plasma Cleaners (Remote Plasma)
samco-ucp's solutions include compact systems for R&D and production systems.
- Process up to 330×330mm
- Gentle substrate handling
- Single substrate
- Hollow cathode
- Process up to ø12" wafers
- Cassette system
- Hollow cathode
- Process up to 280×330mm
- High throughput
- Single substrate
- Hollow cathode
- Process up to ø8" wafers
- Magazine processing
- Hot cathode
