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SAMCO RIE-800iPB in Scientific Paper

Dec 11, 2013

Metal-Containing Block Copolymer Thin Films Yield Wire Grid Polarizers with High Aspect Ratio

So Youn Kim 1, Jessica Gwyther 2, Ian Manners 2, Paul M. Chaikin 3, and Richard A. Register* 1

1 Department of Chemical and Biological Engineering, Princeton University, Princeton, NJ, USA
2 School of Chemistry, University of Bristol, Bristol, United Kingdom
3 Department of Physics, New York University, New York, USA

System used in the research: SAMCO Deep Reactive Ion Etch System, RIE-800iPB

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