Image: Kyoto University's RIE-800iPBC
In March 2011, SAMCO installed three systems at
Kyoto University's Micro/Nano Fabrication Hub. This
research hub is an important component of Japan's
Low-Carbon Research Network (LCnet), a group of
three research hubs and fifteen satellite research
centers that focus on exploring the role of "Green
Nanotechnology" in creating a low-carbon society.
Together with the Research Hub for Advanced Nano
Characterization (University of Tokyo) and Center of
Materials Research for Low Carbon at NIMS (National
Institute for Materials Science), these three research
hubs perform the following functions: 1) micro-
processing and fabrication, 2) evaluation and
measurement, and 3) materials fabrication.
The Micro/Nano Fabrication Hub in Kyoto University is now home to three SAMCO systems: two RIE-
800iPBC systems for deep silicon etching (DSE), and one RIE-10NR system for etching silicon-based
substrates as well as ashing. These systems are contributing to cutting-edge research conducted at the
Micro/Nano Fabrication Hub.
Public use of this technology is one of the purposes of this research hub. As an open laboratory,
members of the public can utilize any of these SAMCO systems upon reservation and payment
(fees are
discounted for students and collaborative researchers).
SAMCO is proud of our presence at Kyoto University and the opportunity to support both researchers
and venture enterprises. As 'Partners in Progress', SAMCO constantly strives to improve our process
technology for research applications involving micro and nano-processing.