SAMCO is proud to announce the release of our newest deep silicon etching system —
the RIE-800iPBC — for MEMS and TSV production processing. The RIE-800iPBC is
the latest in SAMCO's etching system lineup, and was officially introduced by
SAMCO at SEMICON Japan 2013 (the world's largest exhibition for semiconductor
equipment and materials), held in Tokyo from December 4-6, 2013.
The RIE-800iPBC is an extension of SAMCO's highly reliable and reputable RIE-800iPB
system designed for deep silicon etching for R&D and semi-production
applications, and includes a vacuum cassette chamber as well as a wafer
alignment chamber. Both the RIE-800iPB and RIE-800iPBC can process up to 8"
wafers, and are capable of achieving etch rates of over 50 μm/min and etching
uniformity of less than ±3%. Additionally, both systems have features that
allow for low-scallop and notch-free processing on SOI (Silicon on Insulator)
substrates. The RIE-800iPBC is a mass-production system designed with easy
maintenance in mind — reaction chamber parts, RF generators, turbo molecular
pumps, etc. can be removed and exchanged simply and safely.
Aggregate growth of the MEMS market is anticipated due to the widening of the MEMS
application area involving deep silicon etching for various sensor and inkjet
head applications, a rise in TSV processing, and developments in the medical
field. As a continuation of over 34 profitable years in the compound
semiconductor field, SAMCO now aims to be a leading supplier of etching
solutions in the MEMS field. In August 2013, SAMCO's R&D Division initiated
the "MEMS Project". The MEMS Project team developed the RIE-800iPBC and is
actively involved in boosting system performance and application support.
SAMCO's existing lineup of plasma CVD systems, used for deposition of insulation
films in MEMS, is complete with both R&D and production-type systems. The introduction
of the RIE-800iPBC system completes SAMCO's lineup of deep silicon etching
systems that serves the MEMS market.
The pursuit of new businesses is one of SAMCO's mid-term objectives. Developing
solutions for MEMS applications and securing a foothold in the growing MEMS
market are key parts of meeting this objective. The MEMS Project team is
collaborating with SAMCO's OPTO Films Laboratory in Silicon Valley to extend MEMS
technology to fields such as general health care and sports medicine. SAMCO is looking
into the expansion of the MEMS application field by incorporating MEMS technology
in data communication systems (smartphones, tablets, etc.).
For more information please contact SAMCO at (408) 734-0459 or e-mail us at
info@samcointl.com.
About SAMCO
SAMCO (TSE: 6387) was founded by Osamu Tsuji in 1979 as the Semiconductor And Materials
COmpany (SAMCO). From its modest beginnings in a garage in Kyoto, Japan, SAMCO
has grown into a $50 million corporation with more than 150 high-level design
and production research associates at its corporate headquarters in Kyoto,
Japan, sales offices in China, Taiwan, Korea, Singapore, North Carolina and
Silicon Valley, California as well as agents in Europe.