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Tech News

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2026

  • 1 April 2026

    Introduction to the Dual-Chamber ALD System "AD-8002LPC"

  • 5 January 2026

    Stable Device Isolation Processing for 6-Inch GaN-Based Power Devices

2025

  • 1 October 2025

    Atomic-Level Etch Control: Introduction to Atomic Layer Etching (ALE) Systems

  • 1 July 2025

    Simultaneous Double-sided Wafer Deposition via Plasma Enhanced ALD

  • 1 April 2025

    Introduction of the Single-Wafer Aqua Plasma® System

2024

  • 26 December 2024

    ICP Etching Process for Realizing SiC Trench MOSFETs

  • 7 October 2024

    Surface Treatment of Gold Using Aqua Plasma®

  • 16 September 2024

    Introduction to the Long-Term Process Stability of Samco Plasma CVD "PD-220 Series" Systems

  • 26 July 2024

    Innovation with the New Plasma Source HSTC-M™

2022

  • 23 September 2022

    The Anode/Cathode Electrode Switching Function of PECVD System PD-200STL

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