Aqua Plasma® Cleaners
Aqua Plasma® Cleaner is a plasma processing equipment that mainly uses water vapor (H₂O). These systems can perform safe and environmentally friendly surface treatments such as oxide reduction, organic contaminants cleaning, resin bonding, and superhydrophilization.
-
Aqua Plasma® Cleaner AQ-2000
for large size substrates
Remote Plasma Cleaners
samco-ucp's solutions include compact systems for R&D and production systems.
UV Ozone Cleaners
Samco's UV Ozone Cleaners use a unique combination of ultraviolet irradiation, ozone, and stage heating to gently, yet effectively, remove organic materials from a variety of substrates, including silicon, glass, compound semiconductors (GaN, SiC, GaAs, and InP), sapphire, ceramics, etc. Today our product line includes, compact benchtop and cassette type systems for both R&D and mass production customers.
-
UV Ozone Cleaner UV-1
Compact benchtop system
-
UV Ozone Cleaner UV-300H
Ashing rates of >200 nm/min
-
Cassette Loading UV Ozone Cleaner UV-300HC
Production system
