Plasma cleaning systems are designed for the cleaning of plastic microelectronic packages and lead frames as well as LCD circuit boards and other products.
samco-ucp's solutions include compact systems for R&D and pilot production, as well as high throughput mass production systems.

PC-300

• RIE and Plasma modes
• Multi-step recipe storage
• 100 recipes
• Cleaning of plastic packages
• Removal of organics

PC-1100

• Three processing modes (RIE, Plasma & downstream)
• Multiple process shelves
• Recipe storage
• Compact footprint