• 
• 
  • Etching Systems
    • ICP Etching Systems
      (Inductively Coupled Plasma Etching)
    • DRIE Systems
      (Deep Reactive Ion Etching)
    • RIE Systems
      (Reactive Ion Etching)
  • CVD Systems
    • PECVD Systems
      (Plasma Enhanced CVD)
    • LS-CVD Systems
      (Liquid Source CVD)
  • Cleaning Systems
    • UV-Ozone Cleaners
    • Plasma Cleaners
      (Direct Plasma)
    • Plasma Cleaners
      (Remote Plasma)
• 
  • LED
    (Light Emitting Diodes)
  • LD
    (Laser Diodes)
  • MEMS
    (Microelectromechanical Systems)
  • TSV
    (Through Silicon Vias)
  • Power Devices
  • SAW Devices
  • RF Devices
  • Photonic Crystals
• 
  • Optoelectronics
  • Electronic Components
  • Silicon
  • Surface Treatment
  • Display Devices
• 
  • Etching
    • Tornado ICP®
    • Bosch Process
    • GaN Power Device Etching
    • GaN / AlGaN Etching
  • Deposition
    • LS-CVD
  • Cleaning
    • Reversible Electrode Shelf
    • Remote Plasma Sources
    • Chemical vs Physical Cleaning
• 
  • Product Information
  • Service & Support
  • Careers

The wave of MEMS technology is rising, and samco-ucp continues to provide cutting-edge solutions for MEMS applications. samco-ucp’s involvement in the MEMS manufacturing process (shown below) comes in a key step: deep silicon etching. samco-ucp’s DRIE (deep reactive ion etching) systems have proven to be highly effective in the deep, high-speed, anisotropic etching of silicon for MEMS applications.
For MEMS process data, click here

samco-ucp was the first of Japan’s semiconductor process equipment manufacturers to obtain a Bosch Process license, which enabled the development of our DRIE systems. samco-ucp’s RIE-400iPB and RIE-800iPB systems, both using the latest ICP technology and harnessing the Bosch Process, are capable of deep, vertical, high-speed silicon etching required by MEMS devices. Aside from MEMS, samco-ucp’s DRIE systems also serve applications for 3D packaging, TSV (through silicon via), and the manufacturing of ink jet printer heads, sensors, and medical devices such as µTAS.

For MEMS process data, click here