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3D-LSI

3D-LSI [more info]

Processed by RIE-800iPB

Nano-structured Si Device

Nanostructured Silicon Device [more info]

Processed by RIE-200NL
[Photo by AIST Tsukuba]

3D-LSI

3D-LSI [more info]

Processed by LS-CVD system

Failure Analysis

Failure Analysis [more info]

Processed by RIE-200iP

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