News & Events

2016

Samco PD-200STP in Scientific Paper

Mar 08, 2016

Dialectric Coating Thermal Stabilzation During GaAs-Based Laser Fabrication for Improved Device Yield

 Michael K. Connors, Jamal E. Millsapp, and George W. Turner
 Lincoln Laboratory, Massachusetts Institute of Technology, 244 Wood Street, Lexington, Massachusetts 02420

System used in the research: Samco PD-200 STP deposition system

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